Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates

ABSTRACT

Embodiments of the present disclosure generally relate to methods for conditioning an interior wall surface of a remote plasma generator. In one embodiment, a method for processing a substrate is provided. The method includes exposing an interior wall surface of a remote plasma source to a conditioning gas that is in excited state to passivate the interior wall surface of the remote plasma source, wherein the remote plasma source is coupled through a conduit to a processing chamber in which a substrate is disposed, and the conditioning gas comprises an oxygen-containing gas, a nitrogen-containing gas, or a combination thereof. The method has been observed to be able to improve dissociation/recombination rate and plasma coupling efficiency in the processing chamber, and therefore provides repeatable and stable plasma source performance from wafer to wafer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to U.S. provisional patent applicationSer. No. 62/027,051, filed Jul. 21, 2014, which is herein incorporatedby reference.

BACKGROUND

1. Field

Embodiments of the present disclosure generally relate to methods forconditioning remote plasma source.

2. Description of the Related Art

Plasma-enhanced chemical vapor deposition (PECVD) process is a processwhere electromagnetic energy is applied to at least one precursor gas orvapor to transform the precursor into a reactive plasma. Forming aplasma can lower the temperature required to form a film, increase therate of formation, or both. Plasma may be generated inside theprocessing chamber, i.e., in situ, or in a remote plasma generator thatis remotely positioned from the processing chamber. Remote plasmagenerators offer several advantages. For example, the remote plasmagenerator provides a plasma capability to a deposition system that doesnot have an in situ plasma system. The use of the remote plasmagenerator also minimizes the plasma interaction with the substrate andchamber components, thereby preventing the interior of the processingchamber from undesirable by-products of the plasma formation process.

Remote plasma generators generally have a protective anodized aluminumcoating to protect the aluminum interior walls from degradation.However, anodized aluminum coatings are usually porous and prone tosurface reactions. Therefore, the lifetime of anodized aluminum coatingsis limited due to the degradation of the anodized coating in the plasmacleaning environment. Failure of the protective anodized coating over analuminum surface leads to excessive particulate generation within thedownstream reactor chamber. In addition, the downstream reactor chamberalso suffers unstable plasma performance due to change in surfacecondition of the protective anodized coating as the process continues.Therefore, the wafer deposition/etch rates, film uniformity and plasmacoupling efficiency from wafer to wafer are degraded.

While a frequent chamber cleaning may be performed to stabilize thechamber conditions, the chamber cleaning chemistries such as NF₃ willdegrade the anodized coating to degrade at much faster rate. In somecases where the remote plasma source uses an AlN plasma block oranodized plasma block, the surface condition inside the remote plasmasource will change over time with deposition or clean chemistries. Thischange in surface condition of the plasma block does not providerepeatable plasma performance resulting in inconsistent wafer-to-waferperformance over time.

Therefore, there is a need for methods for conditioning the surface ofthe remote plasma generator to provide stable and repeatable plasmaperformance while maintaining the substrate throughput.

SUMMARY

Embodiments of the present disclosure generally relate to methods forconditioning an interior wall surface of a remote plasma generator. Inone embodiment, a method for processing a substrate is provided. Themethod includes exposing an interior wall surface of a radical source toa conditioning gas that is in excited state to passivate the interiorwall surface of the radical source, wherein the radical source iscoupled through a radical conduit to a processing chamber in which asubstrate is disposed, and the conditioning gas comprises anoxygen-containing gas, a nitrogen-containing gas, or a combinationthereof.

In another embodiment, the method includes (a) exposing an interior wallsurface of a radical source to a conditioning gas that is in excitedstate to passivate the interior wall surface of the radical source,wherein the radical source is coupled through a radical conduit to aprocessing chamber in which a substrate is disposed, and theconditioning gas comprises an oxygen-containing gas, anitrogen-containing gas, or a combination thereof, (b) performing aseries of processes on N number of substrates from a batch of substratesin the processing chamber using radicals from the radical source, whereN is an integral number of substrates between 1 and 20, and (c)repeating (a) and (b) until the last substrate in the batch of thesubstrates is processed and removed from the processing chamber.

In yet another embodiment, the method includes exposing an interior wallsurface of a radical source to a conditioning gas, wherein theconditioning gas comprises an oxygen-containing gas, anitrogen-containing gas, or a combination thereof, generating a plasmafrom the conditioning gas in the radical source to passivate theinterior wall surface of the radical source, and performing a series ofprocesses on N number of substrates in the processing chamber usingradicals from the radical source, where N is an integral number ofsubstrates between 1 and 20.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlyexemplary embodiments and are therefore not to be considered limiting ofits scope, may admit to other equally effective embodiments.

FIG. 1 is a cross-sectional view of an apparatus for forming dielectricfilms according to embodiments of the present disclosure,

FIG. 2 illustrates a method for conditioning a radical source of FIG. 1according to embodiments of the present disclosure.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements and features of oneembodiment may be beneficially incorporated in other embodiments withoutfurther recitation.

DETAILED DESCRIPTION

FIG. 1 is a cross-sectional view of an apparatus 100 for formingdielectric films according to embodiments of the present disclosure. Inone embodiment, the apparatus 100 includes a processing chamber 102 anda radical source 104 coupled to the processing chamber 102. The radicalsource 104 may be any suitable source that is capable of generatingradicals. The radical source 104 may be a remote plasma source, such asa radio frequency (RF) or very high radio frequency (VHRF) capacitivelycoupled plasma (CCP) source, an inductively coupled plasma (ICP) source,a microwave induced (MW) plasma source, an electron cyclotron resonance(ECR) chamber, or a high density plasma (HDP) chamber. Alternatively,the radical source 104 may be an ultraviolet (UV) source or the filamentof a hot wire chemical vapor deposition (HW-CVD) chamber. The radicalsource 104 may include one or more gas inlets 106 and the radical source104 may be coupled to the processing chamber 102 by a radical conduit108. One or more process gases, which may be radical-forming gases, mayenter the radical source 104 via the one or more gas inlets 106. The oneor more process gases may comprise an oxygen-containing gas, anitrogen-containing gas, a hydrogen containing gas, or any combinationthereof. Radicals generated in the radical source 104 travel into theprocessing chamber 102 through the radical conduit 108 coupling to theprocessing chamber 102.

The radical source 104 may have an anodized coating applied to thealuminum interior chamber walls to protect the underlying aluminuminterior chamber walls from corrosion or degradation. In variousembodiments, the anodized protective coating is formed from aluminumoxide or aluminum nitride.

The radical conduit 108 is a part of a lid assembly 112, which alsoincludes a radical cavity 110, a top plate 114, a lid rim 116, and adual-zone showerhead 118. The radical conduit 108 may comprise amaterial that is substantially nonreactive to radicals. For example,radical conduit 108 may comprise AlN, SiO₂, Y₂O₃, MgO, anodized Al₂O₃,sapphire, ceramics containing one or more of Al₂O₃, sapphire, AlN, Y₂O₃,MgO, or plastics. A representative example of a suitable SiO₂ materialis quartz. Alternatively or additionally, radical conduit 108 may have acoating on the surface that contacts the radicals in operation. Thecoating may also comprise AlN, SiO₂, Y₂O₃, MgO, anodized Al₂O₃,sapphire, ceramics containing one or more of Al₂O₃, sapphire, AlN, Y₂O₃,MgO, or plastics. If a coating is used, the thickness of the coating maybe between about 1 μm and about 1 mm. The coating may be applied using aspray coating process. The radical conduit 108 may be disposed withinand supported by a radical conduit support member 120. The radicalconduit support member 120 may be disposed on the top plate 114, whichrests on the lid rim 116.

The radical cavity 110 is positioned below and coupled to the radicalconduit 108, and the radicals generated in the radical source 104 travelto the radical cavity 110 through the radical conduit 108. The radicalcavity 110 is defined by the top plate 114, the lid rim 116 and thedual-zone showerhead 118. Optionally, the radical cavity 110 may includea liner 122. The liner 122 may cover surfaces of the top plate 114 andthe lid rim 116 that are within the radical cavity 110. The liner 122may comprise a material that is substantially nonreactive to radicals.For example, the liner 122 may comprise AlN, SiO₂, Y₂O₃, MgO, anodizedAl₂O₃, sapphire, ceramics containing one or more of Al₂O₃, sapphire,AlN, Y₂O₃, MgO, or plastics. Alternatively or in addition to, thesurfaces of the radical cavity 110 that are in contact with radicals maybe composed of or coated with a material that is substantiallynonreactive to radicals. For example, the surfaces may be composed of orcoated with AlN, SiO₂, Y₂O₃, MgO, anodized Al₂O₃, sapphire, ceramicscontaining one or more of Al₂O₃, sapphire, AlN, Y₂O₃, MgO, or plastics.If a coating is used, the thickness of the coating may be between about1 μm and about 1 mm. By not consuming the generated radicals, theradical flux to a substrate disposed in the processing chamber 102 isincreased.

An ion filter 123 may be disposed in the radical cavity 110 between thetop plate 114 and the dual-zone showerhead 118. The ion filter 123 maybe a perforated plate that is electrically grounded. If the radicals aregenerated within a plasma, the ions, electrons, and ultravioletradiation generated in the plasma may be blocked by the ion filter 123in order to direct only radicals to the dual-zone showerhead 118 and toprevent damage to the deposited film. Ion filter 123 can also controlthe number of radicals that pass through. Radicals then pass through aplurality of tubes 124 disposed in the dual-zone showerhead 118 to enterinto a processing region 128. The dual-zone showerhead 118 furtherincludes a plurality of openings 126 that are smaller in diameter thanthe plurality of tubes 124. The plurality of openings 126 are connectedto an internal volume (not shown) that is not in fluid communicationwith the plurality of tubes 124. One or more fluid sources 119 may becoupled to the dual-zone showerhead 118 for introducing a fluid mixtureinto a processing region 128 of the processing chamber 102. The fluidmixture may include precursor, porogen, and/or carrier fluids. The fluidmixture may be a mixture of gases and liquids.

The processing chamber 102 may include the lid assembly 112, a chamberbody 130 and a support assembly 132. The support assembly 132 may be atleast partially disposed within the chamber body 130. The chamber body130 may include a slit valve 135 to provide access to the interior ofthe processing chamber 102. The chamber body 130 may include a liner 134that covers the interior surfaces of the chamber body 130. The liner 134may include one or more apertures 136 and a pumping channel 138 formedtherein that is in fluid communication with a vacuum system 140. Theapertures 136 provide a flow path for gases into the pumping channel138, which provides an egress for the gases within the processingchamber 102.

The vacuum system 140 may include a vacuum port 142, a valve 144 and avacuum pump 146. The vacuum pump 146 is in fluid communication with thepumping channel 138 via the vacuum port 142. The apertures 136 allow thepumping channel 138 to be in fluid communication with the processingregion 128 within the chamber body 130. The processing region 128 isdefined by a lower surface 148 of the dual-zone showerhead 118 and anupper surface 150 of the support assembly 132, and the processing region128 is surrounded by the liner 134.

The support assembly 132 may include a support member 152 to support asubstrate (not shown) for processing within the chamber body 130. Thesubstrate may be any standard wafer size, such as, for example, 300 mm.Alternatively, the substrate may be larger than 300 mm, such as 450 mmor larger. The support member 152 may comprise aluminum nitride (AlN) oraluminum depending on operating temperature. The support member 152 maybe configured to chuck the substrate and the support member 152 may bean electrostatic chuck or a vacuum chuck.

The support member 152 may be coupled to a lift mechanism 154 through ashaft 156 which extends through a centrally-located opening 158 formedin a bottom surface of the chamber body 130. The lift mechanism 154 maybe flexibly sealed to the chamber body 130 by bellows 160 that preventsvacuum leakage from around the shaft 156. The lift mechanism 154 allowsthe support member 152 to be moved vertically within the chamber body130 between a process position and a lower, transfer position. Thetransfer position is slightly below the opening of the slit valve 135.During operation, the spacing between the substrate and the dual-zoneshowerhead 118 may be minimized in order to maximize radical flux at thesubstrate surface. For example, the spacing may be between about 100 mmand about 5,000 mm. The lift mechanism 154 may be capable of rotatingthe shaft 156, which in turn rotates the support member 152, causing thesubstrate disposed on the support member 152 to be rotated duringoperation.

One or more heating elements 162 and a cooling channel 164 may beembedded in the support member 152. The heating elements 162 and coolingchannel 164 may be used to control the temperature of the substrateduring operation. The heating elements 162 may be any suitable heatingelements, such as one or more resistive heating elements. The heatingelements 162 may be connected to one or more power sources (not shown).The heating elements 162 may be controlled individually to haveindependent heating and/or cooling control on multi-zone heating orcooling. With the ability to have independent control on multi-zoneheating and cooling, the substrate temperature profile can be enhancedat any giving process conditions. A coolant may flow through the channel164 to cool the substrate. The support member 152 may further includegas passages extending to the upper surface 150 for flowing a coolinggas to the backside of the substrate.

An RF source may be coupled to either the dual-zone showerhead 118 orthe support member 152. The RF source may be low frequency, highfrequency, or very high frequency. In one embodiment, the dual-zoneshowerhead 118 is coupled to the RF source and the support member 152 isgrounded, as shown in FIG. 1. In another embodiment, the dual-zoneshowerhead 118 is grounded and the support member 152 is coupled to theRF source. In either embodiment, a capacitively coupled plasma may beformed in the processing region 128 between the dual-zone showerhead 118and the support member 152 during operation. The capacitively coupledplasma formed in the processing region 128 is in addition to the plasmaformed in the radical source when the radical source is a remote plasmasource. The support member 152 may be biased with a DC source toincrease ion bombardment.

FIG. 2 illustrates a method 200 for conditioning the radical source 104of FIG. 1 according to embodiments of the present disclosure. It shouldbe noted that the method 200 may be applicable to any remote plasmasource that is positioned remotely from the processing chamber in whicha substrate is disposed. The method 200 may be performed before, during,or after processing of each substrate (e.g., deposition or etch process)in the processing chamber, in some embodiments, the method 200 may beperformed periodically after a predetermined number of substrates, suchas about 2 to about 15 substrates, have been processed. In such a case,the method 200 may be performed without the substrate being presented inthe processing chamber. It should be noted that the sequence of stepsillustrated in FIG. 2 are not intended to be limiting as to the scope ofthe disclosure described herein, since one or more steps may be added,deleted and/or reordered without deviating from the basic scope of thedisclosure.

At block 202, the radical source 104 is optionally purged with acleaning gas. The cleaning gas may be introduced into the radical source104 from a cleaning gas source through one or more gas inlets 106. Thecleaning gas may be thermally activated and/or plasma-assisted underprocess conditions suitable to effectively remove any unwanted debits orby-products from the radical source 104. Exemplary cleaning gas mayinclude, but is not limited to NF₃, NH₃, F₂, CF₄, C₂F₆, C₄F₈, SF₆, CHF₃,CF₆, H₂, CCl₄, C₂Cl₆, or any combination thereof. Optionally, thecleaning gas may further include an inert gas, such as argon or helium.In some embodiments, the cleaning gas may be introduced into the radicalsource 104 along with a conditioning gas, as will be described below atblock 204. In some embodiments, the above cleaning process may beperformed in the processing chamber 102. The cleaning process may beperformed for about 3 seconds to about 300 seconds, depending upon thenumber of substrates processed in the processing chamber between eachcleaning.

At block 204, a conditioning gas is introduced into the radical source104 from a conditioning gas source through one or more gas inlets 106.In various embodiments, the conditioning gas may include anoxygen-containing gas, a nitrogen-containing gas, or a combinationthereof, Exemplary oxygen-containing gas may include, but is not limitedto, one or more of the following: oxygen (O₂) gas, ozone (O₃) gas,nitrous oxide (N₂O), nitrogen monoxide (NO), carbon monoxide (CO),carbon dioxide (CO₂), water vapor (H₂O), or any combination thereof.Exemplary nitrogen-containing gas may include, but is not limited to,one or more of the following: ammonia (NH₃), nitrogen (N₂), hydrazine(N₂H₄), nitric oxide (NO), nitrous oxide (N₂O), or nitrogen dioxide(NO₂), or any combination thereof. The use of a conditioning gascontaining oxygen-containing gas may be advantageous if the anodizedprotective coating of the radical source 104 is aluminum oxide. The useof a conditioning gas containing nitrogen-containing gas may beadvantageous if the anodized protective coating of the radical source104 is aluminum nitride. In some embodiments, a conditioning gascomprising a oxygen-containing gas may be used in cases where theanodized protective coating of the radical source 104 is aluminumnitride. In some embodiments, a conditioning gas comprising anitrogen-containing gas may be used in cases where the anodizedprotective coating of the radical source 104 is aluminum oxide.

A chemically inert gas, such as helium gas, nitrogen gas, or argon gas,may be flowed into the processing chamber with the conditioning gas. Ifan inert gas is used, the inert gas may be introduced at an inert gas toconditioning gas ratio of about 1:1 to about 1:20, such as about 1:6 toabout 1:15, for example about 1:10. In one embodiment, the conditioninggas may be introduced into the radical source 104 at a flow rate betweenabout 2000 sccm and about 20000 sccm and at a chamber pressure of about0.1 Torr to about 20 Torr.

At block 206, a plasma is generated from the conditioning gas in theradical source 104 to passivate or restore the interior wall surface ofthe radical source 104. In some embodiments, instead of striking theplasma within the radical source 104, a conditioning gas in an excitedstate may be flowed into the radical source 104 from a remote plasmasource that is separate from the radical source. The term “excitedstate” used herein refers to a gas wherein at least some of the gasmolecules are in vibrationally-excited, dissociated and/or ionizedstates. Alternatively, the passivation of the interior wall surface ofthe radical source 104 may be performed using a plasma-free process.That is, the conditioning gas is introduced into the radical source 104and excited or dissociated at an elevated temperature suitable forthermal decomposition of the conditioning gas.

In case the radical source 104 is a capacitively coupled plasma (CCP)type source, the radical source 104 may be maintained at a pressure ofabout 0.1 Torr to about 20 Torr, for example about 1 Torr to about 10Torr, and a temperature of about 250° C. to about 400° C. during thepassivation. If the conditioning gas is dissociated using a RF power,the RF power density supplied to the radical source 104 may be betweenabout 0.001 W/cm² to about 5 W/cm², such as from about 0.01 W/cm² toabout 1 W/cm², for example about 0.04 W/cm²to about 0.07 W/cm².

The processing time for the passivation of the interior wall surface ofthe radical source 104 may vary depending upon the number of thesubstrates processed (i.e., substrate process time) and/or the durationof the process (e.g., deposition or etch process) performed on thesubstrate within the processing chamber 102 (i.e., substrate processtime) between each passivation process. In most cases, the passivationprocess time may be between about 2 seconds and about 30 seconds, suchas about 3 seconds to about 25 seconds, for example about 10 seconds. Invarious embodiments, the passivation process time and the substrateprocess time may be at a ratio of about 1:5 to about 1:30, such as about1:8 to about 1:20, for example about 1:12.

At block 208, once the interior wall surface of the radical source 104has been passivated or restored, a series of processes are performed onN number of substrates (where N is an integral number of substrates)from a batch of substrates in the downstream processing chamber, e.g.,the processing chamber 102 of FIG. 1. In one embodiment, the N rangesbetween 1 and 20 substrates, such as between about 3 substrates andabout 10 substrates, for example about 5 substrates, The process may beany deposition and/or etch process used to deposit or etch, for example,oxide or nitride materials, silicon-containing materials, orcarbon-containing materials, either doped or undoped. The depositionand/or etch process may use radicals from the radical source. In oneexample, the deposition process is a flowable chemical vapor deposition(CVD) using silicon-containing precursor and NH₃O₂/N₂/H₂ oxidizerchemistries to deposit dielectric materials. During deposition or etchprocess, an oxygen-containing gas and/or a nitrogen-containing gas maybe flowed into the radical source 104 to stabilize the plasma.

At block 210, after the series of deposition/etch processes areperformed, an interior wall surface of the processing chamber 102 may beoptionally purged using a cleaning process. The cleaning process can bethe same cleaning process described above with respect with block 202.In one example, the processing chamber 102 is cleaned using a cleaninggas comprising NF₃, ammonia, or a combination of thereof. During thecleaning of the processing chamber 102, an oxygen-containing gas, suchas the oxygen-containing gas described above with respect to block 204,may be flowed into the radical source 104 for conditioning the interiorwall surface of the radical source 104.

During cleaning, the cleaning gas may be introduced into the processingchamber 102 at a flow rate between about 2000 sccm and about 20000 sccm.The processing chamber 102 may be maintained at a pressure of about 0.1Torr to about 20 Torr. A RF power, if used, may be supplied to theprocessing chamber 102 at a density of about 0.001 W/cm² to about 5W/cm², such as from about 0.01 W/cm² to about 1 W/cm², for example about0.04 W/cm² to about 0.07 W/cm², to activate the cleaning gas.

The processes described at blocks 202-210 may be repeated until the lastsubstrate in the batch of the substrates is finished with the processand removed from the processing chamber 102.

Various processes are contemplated and may be added to the method 200.In some embodiments, a seasoning process may be optionally performedbefore the deposition or etch process i.e., before block 208) or afterthe processing chamber 102 has been cleaned (i.e., after block 210) todeposit a seasoning layer on the walls of the cleaned processing chamber102. In such a case, the passivation process as described at blocks 204and 206 may be performed immediately before and/or after the seasoningprocess. The protective layer may vary depending upon the process to beperformed in the processing chamber 102. For example, if anitrogen-containing layer is to be deposited on the substrate, aseasoning layer of silicon nitride may be deposited onto the chambersurface of the processing chamber 102. The seasoning layer acts as aglue layer so that the subsequently deposited nitrogen-containingmaterials tend to adhere thereto better than to the interior chambersurface of the processing chamber 102. Therefore, residualnitrogen-containing materials are less likely to become dislodged duringsubstrate processing. The seasoning process may be carried out with nosubstrate in the processing chamber 102. Alternatively, a sacrificial(dummy) substrate may be placed in the processing chamber 102 during theseasoning process.

In cases where the cleaning process is performed in the processingchamber 102 after the deposition/etch process, an optional conditioningprocess may be performed to remove undesirable fluorine (F) or nitrogen(N) containing contaminants from the cleaning process that are bondedto, or adsorbed on, the chamber surfaces of the processing chamber 102.In one embodiment, a hydrogen-containing plasma may be generated in theprocessing chamber 102 by flowing 1200 sccm of hydrogen into theprocessing chamber 102 for 30 seconds, creating a plasma using 300 Wattsof power. The hydrogen plasma reacts with the fluorine present in theprocessing chamber 102 and forms a volatile HF containing vapor that isreadily removable via the chamber exhaust. The processing chamber 102may be maintained at the temperature to be used for subsequentdeposition/etch process, and a pressure of about 1-10 Torr. Theelectrode spacing between the showerhead 118 and the support assembly132 may be about 800-1500 mils.

Benefits of the present disclosure provide methods for passivating orrestoring an interior wall surface of a remote plasma generator byexposing the interior wall surface to a plasma formed from aconditioning gas comprising an oxygen-containing gas, anitrogen-containing gas, or a combination thereof. The inventive processrestores and stabilizes the surface condition of the interior wallsurface of the remote plasma source. Therefore, the lifetime of theprotective anodized aluminum coating is improved even in the plasmacleaning environment, which leads to minimized particulate generationwithin the downstream reactor chamber. The inventive process thusresults in improved deposition rate, improved deposition uniformity andplasma coupling efficiency in the processing chamber during subsequentdeposition. As a result, a repeatable and stable plasma sourceperformance from wafer to wafer is obtained.

While a frequent chamber cleaning may be performed to stabilize thechamber conditions, the chamber cleaning chemistries such as NF₃ willdegrade the anodized coating to degrade at much faster rate. In somecases where the remote plasma source uses an AlN plasma block oranodized plasma block, the surface condition inside the remote plasmasource will change over time with deposition or clean chemistries. Thischange in surface condition of the plasma block does not providerepeatable plasma performance resulting in inconsistent wafer-to-waferperformance over time

While the foregoing is directed to embodiments of the presentdisclosure, other and further embodiments of the disclosure may bedevised without departing from the basic scope thereof, and the scopethereof is determined by the claims that follow.

What is claimed is:
 1. A method for processing a substrate, comprising:exposing an interior wall surface of a remote plasma source to aconditioning gas that is in excited state to passivate the interior wallsurface of the remote plasma source, wherein the remote plasma source iscoupled through a conduit to a processing chamber in which a substrateis disposed, and the conditioning gas comprises one or moreoxygen-containing gases, one or more nitrogen-containing gases, or acombination thereof.
 2. The method of claim 1, wherein the interior wallsurface of the remote plasma source is formed from aluminum oxide oraluminum nitride and the conditioning gas is the oxygen-containing gas.3. The method of claim 2, wherein the one or more oxygen-containinggases comprise oxygen (O₂) gas, ozone (O₃) gas, nitrous oxide (N₂O),nitrogen monoxide (NO), carbon monoxide (CO), carbon dioxide (CO₂),water vapor (H₂O), or any combination thereof.
 4. The method of claim 1,wherein the interior wall surface of the remote plasma source is formedfrom aluminum oxide or aluminum nitride and the conditioning gas is thenitrogen-containing gas.
 5. The method of claim 4, wherein the one ormore nitrogen-containing gases comprise ammonia (NH₃), nitrogen (N₂),hydrazine (N₂H₄), nitric oxide (NO), nitrous oxide (N₂O), or nitrogendioxide (NO₂), or any combination thereof.
 6. The method of claim 1,wherein the conditioning gas further comprises a chemically inert gas,and the inert gas is at an inert gas to conditioning gas ratio of about1:6 to about 1:15.
 7. The method of claim 1, further comprising: afterexposing an interior wall surface of a remote plasma source to aconditioning gas, performing a series of processes on N number ofsubstrates in the processing chamber using radicals from the remoteplasma source, where N is an integral number of substrates between 1 and20.
 8. The method of claim 1, further comprising: before exposing aninterior wall surface of a remote plasma source to a conditioning gas,exposing an interior wall surface of the processing chamber to acleaning gas, wherein the cleaning gas comprises NF₃, NH₃, F₂, CF₄,C₂F₆, C₄F₈, SF₆, CHF₃, CF₆, H₂, CCl₄, C₂Cl₆, or any combination thereof.9. The method of claim 8, further comprising: exposing the interior wallsurface of the remote plasma source to an oxygen-containing gas duringthe cleaning of the processing chamber
 10. A method for processing asubstrate, comprising: (a) exposing an interior wall surface of a remoteplasma source to a conditioning gas that is in excited state topassivate the interior wall surface of the remote plasma source, whereinthe remote plasma source is coupled through a conduit to a processingchamber in which a substrate is disposed, and the conditioning gascomprises an oxygen-containing gas, a nitrogen-containing gas, or acombination thereof; (b) performing a series of processes on N number ofsubstrates from a batch of substrates in the processing chamber usingradicals from the remote plasma source, where N is an integral number ofsubstrates between 1 and 20; and (c) repeating (a) and (h) until thelast substrate in the batch of the substrates is processed and removedfrom the processing chamber.
 11. The method of claim 10, furthercomprising: before (a), exposing an interior wall surface of theprocessing chamber to a cleaning gas, wherein the cleaning gas comprisesNF₃, NH₃, F₂, CF₄, C₂F₆, C₄F₈, SF₆, CHF₃, CF₆, H₂, CCl₄, C₂Cl₅, or anycombination thereof.
 12. The method of claim 11, further comprising:exposing the interior wall surface of the remote plasma source to anoxygen-containing gas during the cleaning of the processing chamber. 13.The method of claim 10, further comprising: after (b), exposing aninterior wall surface of the processing chamber to a cleaning gas,wherein the cleaning gas comprises NF₃, NH₃, F₂, CF₄, C₂F₆, C₄F₈, SF₆,CHF₃, CF₆, H₂, CCl₄, C₂Cl₆, or any combination thereof.
 14. The methodof claim 13, further comprising: exposing the interior wall surface ofthe remote plasma source to an oxygen-containing gas during the cleaningof the processing chamber.
 15. The method of claim 10, wherein thepassivation time of the interior wall surface of the remote plasmasource and the processing time for performing a series of processes on Nnumber of substrates are at a ratio of about 1:5 to about 1:30.
 16. Themethod of claim 10, wherein the conditioning gas further comprises achemically inert gas, and the inert gas is at an inert gas toconditioning gas ratio of about 1:6 to about 1:15.
 17. The method ofclaim 10, wherein the conditioning gas is excited by an RF power orthermally excited in the remote plasma source, or excited by an RF poweror thermally excited in a radical source that is separated from theremote plasma source.
 18. A method for processing a substrate,comprising: exposing an interior wall surface of a remote plasma sourceto a conditioning gas, wherein the conditioning gas comprises anoxygen-containing gas, a nitrogen-containing gas, or a combinationthereof; generating a plasma from the conditioning gas in the remoteplasma source to passivate the interior wall surface of the remoteplasma source: and performing a series of processes on N number ofsubstrates in the processing chamber using radicals from the remoteplasma source, where N is an integral number of substrates between 1 and20.
 19. The method of claim 18, wherein the conditioning gas furthercomprises a chemically inert gas, and the inert gas is at an inert gasto conditioning gas ratio of about 1:6 to about 1:15.
 20. The method ofclaim 18, wherein the passivation time of the interior wall surface ofthe remote plasma source and the processing time for performing a seriesof processes on N number of substrates are at a ratio of about 1:5 toabout 1:30.